The countless applications of plasma polymerization, from housekeeping to nanotechnology, and the generally weak understanding of the mechanisms of this process dictate the need to study its theoretical foundations. This book comprises a detailed description of the formation of local mechanisms of polymer synthesis in the main zones of glow discharge by electrophysical collision-type processes specific to each zone. The zonal mechanisms are so different that the local polymerization rates can differ by hundreds of times. The most powerful cathode mechanism creates polymer films with signs of radiation damage to the structure: abnormal over-compaction and associated compression stresses, microcraters from ion shocks and micro-explosions. The book will be of interest to researchers, postgraduates and students in plasma chemistry and plasma technology.