This book describes the latest research in the area of NEM switches and explores the possibility to use them for low-power logic applications. The authors discuss the fundamental technology challenges and solutions to form reliable contacts at nanometer scale and fabricate scalable NEM switches. Coverage includes techniques that enable readers to design circuits and systems which exploit the unique features of the NEM switch to achieve better energy efficiency and address cost pressures in future IT systems. Readers will also benefit from a roadmap to apply the new technology in different application domains including low-power sensors, radiation-hard equipment, harsh environments, and ultra-low power logic.